| 摘要 |
The disclosure is directed to a thin-film for use in below 300 nm laser systems that can be applied to a variety of substrate types. The thin film consists of a blocking layer of a selected material and a matching structure, the matching structure consisting of 1-7 layers of a selected material. The blocking layer serves to minimize or eliminate the transmission of below 300 nm laser light into an adhesive that is used to bond the substrate to a holder. The matching layer(s) minimize internal reflectance of below 300 nm laser light from the blocking layer back into the substrate. |
