发明名称 閉じ込め層およびそれを使って製造されるデバイスを製造するための方法および材料
摘要 There is provided a process for forming a contained second layer over a first layer, including the steps: forming the first layer having a first surface energy; treating the first layer with a priming material to form a priming layer; exposing the priming layer patternwise with radiation resulting in exposed areas and unexposed areas; developing the priming layer to effectively remove the priming layer from the unexposed areas resulting in a first layer having a pattern of priming layer, wherein the pattern of priming layer has a second surface energy that is higher than the first surface energy; and forming the second layer by liquid depositions on the pattern of priming layer on the first layer. The priming material has Formula I In Formula I: Ar1 through Ar4 are the same or different and are aryl groups; L is a spiro group, an adamantyl group, bicyclic cyclohexyl, deuterated analogs thereof, or substituted derivatives thereof; R1 is the same or different at each occurrence and is D, F, alkyl, aryl, alkoxy, silyl, or a crosslinkable group, where adjacent R1 groups can be joined together to form an aromatic ring; R2 is the same or different at each occurrence and is H, D, or halogen; a is the same or different at each occurrence and in an integer from 0-4; and n is an integer greater than 0.
申请公布号 JP5871949(B2) 申请公布日期 2016.03.01
申请号 JP20130546295 申请日期 2011.12.19
申请人 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーE.I.DU PONT DE NEMOURS AND COMPANY 发明人 ノーラ サビナ ラドゥ;アダム フェンニモア
分类号 H05B33/10;C09K11/06;H01L51/50 主分类号 H05B33/10
代理机构 代理人
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