| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro flow chip which is easy to operate when being used.SOLUTION: A micro flow chip 1 includes a first substrate 11 having, on a front surface 13 thereof, grooves 17, 18, and 19 not mutually connected and a second substrate 12 put on the front surface 13 of the first substrate 11 in a laminated state. The grooves 17, 18, and 19 on the surface 13 of the first substrate 11 are covered with the second substrate 12, and a micro flow channel is constituted of the covered grooves 17, 18, and 19. The first substrate 11 is made of an elastic material. Through holes 7, 8, and 9 penetrating to respective grooves 17, 18, and 19 from the side of a rear surface 14 of the first substrate 11 are formed. A three-way solenoid valve 6 which is inserted to the through holes 7, 8, and 9 to couple with the through holes 7, 8, and 9 and controls opening/closing of the micro flow channel is provided on the side of the rear surface 14 of the first substrate 11. Thus a structure of an entire system using the micro flow channel chip can be simplified. |
