| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a linearity checkup method that can help ease the limitation of an installing location and check up the linearity of an edge side of an object of checkup while restraining an increase in cost. <P>SOLUTION: A device for implementing a linearity checkup method for checking up the linearity of an edge side 8 of a checkup object 7 in a plan view comprises a distance detector 2 that detects information corresponding to the distance to the edge side 8, shifting means 4 that shifts the checkup object 7 from one end 9 of the edge side 8 toward another end 10 with respect to the distance detector 2, and an information processor 1 that figures out the linearity of the edge side 8 from the result of detection by the distance detector 2, in which the distance detector 2 is further provided with two or more sensors 3 arranged along a shifting direction T of the shifting by the shifting means 4, and performs detection of the information every time the shifting extent of the checkup object 7 reaches an integral multiple of a number not greater than the balance of subtraction of 1 from the number of the sensors 3 each spaced at an interval L from the adjoining one. <P>COPYRIGHT: (C)2012,JPO&INPIT |
