发明名称 アブレシブエッチングおよびカッティングのためのフォトレジスト膜および方法
摘要 A photoresist film and method of using the photoresist film is described. The photoresist film allows for fine-detail abrasive blasting of substrates without the use of organic solvents for development. The photoresist film can be formed without the use of a membrane or adhesive layer, both of which are typically used to secure one side of the photoresist film to a carrier and one side of the photoresist film to a substrate. The photoresist films of the present invention typically include an ethylene-vinyl acetate copolymer ("EVA"), a polyvinyl acetate ("PVAc"), and a photo polymer. Suitable photopolymers include polyvinyl alcohol photopolymers.
申请公布号 JP5871904(B2) 申请公布日期 2016.03.01
申请号 JP20130505060 申请日期 2011.04.12
申请人 イコニクス コーポレーションIKONICS CORPORATION 发明人 ダニエル・ビー・メノー;ビンセント・イー・リベリ
分类号 G03F7/004;B24C1/04;G03F7/32;G03F7/38;G03F7/40 主分类号 G03F7/004
代理机构 代理人
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