Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, ultrasonic transducer, and ultrasonic device

摘要

A liquid ejecting head includes a passage-forming substrate provided with a pressure-generating chamber communicating with a nozzle orifice for ejecting a liquid and includes a piezoelectric element including a diaphragm disposed on the passage-forming substrate, a first electrode disposed on the diaphragm, a piezoelectric layer disposed on the first electrode, and second electrode disposed on the piezoelectric layer. The diaphragm includes a metal oxide layer of a metal oxide formed by a gas-phase method and a zirconium oxide layer of zirconium oxide formed by a liquid-phase method.

主权项

1. A piezoelectric element comprising:
a diaphragm; a first electrode disposed on the diaphragm; a piezoelectric layer disposed on the first electrode; and a second electrode disposed on the piezoelectric layer, wherein the diaphragm includes two metal oxide layers each having a columnar crystal structure and a zirconium oxide layer having a granular crystal structure, the zirconium oxide layer being disposed between the two metal oxide layers.