发明名称 処理装置
摘要 PROBLEM TO BE SOLVED: To provide a processing device reduced in probability of inducing defects such as falling of a sample table.SOLUTION: A processing device includes: an inner tank 2 capable of filling a treatment liquid 4 at the inside thereof; and a rotation mechanism 3 capable of agitating the treatment liquid 4 by rotating the inner tank 2.
申请公布号 JP5871856(B2) 申请公布日期 2016.03.01
申请号 JP20130104895 申请日期 2013.05.17
申请人 三菱電機株式会社 发明人 武藤 祥生
分类号 H01L21/306;H01L21/304 主分类号 H01L21/306
代理机构 代理人
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