发明名称 |
APPARATUS FOR GROWING SILICON INGOT |
摘要 |
The present invention relates to an ingot growing device used for growing an ingot. If the height between a lower end part of a tube and a molten solution in a crucible exceeds the recommended height due to the short length of the tube descending from a pull chamber, a moving guide part provided on an upper end part of the tube additionally moves toward the lower part along a guide bar on a descent guide member, allowing the tube to additionally move to the lower part in a simple composition, without altering the length of the tube. Thus, raw material can be stably supplied from the tube to the crucible. |
申请公布号 |
KR101598708(B1) |
申请公布日期 |
2016.02.29 |
申请号 |
KR20140112414 |
申请日期 |
2014.08.27 |
申请人 |
FIS CO., LTD.;SKC SOLMICS CO., LTD. |
发明人 |
WOO, JAE CHUN;CHANG, JAE HYOUK |
分类号 |
C30B15/00;C30B29/06;H01L21/02 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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