发明名称 METHOD FOR BONDING OF CONTACT SURFACES
摘要 A method for bonding of a first, at least partially metallic contact surface of a first substrate to a second, at least partially metallic contact surface of a second substrate, with the following steps, especially the following progression: application of a sacrificial layer which is at least partially, especially predominantly soluble in the material of at least one of the contact surfaces to at least one of the contact surfaces, bonding of the contact surfaces with at least partial solution of the sacrificial layer in at least one of the contact surfaces.
申请公布号 SG11201600043R(A) 申请公布日期 2016.02.26
申请号 SG11201600043R 申请日期 2013.07.05
申请人 EV GROUP E. THALLNER GMBH 发明人 REBHAN, BERNHARD
分类号 H01L21/60;H01L21/66;H01L21/67;H01L23/488 主分类号 H01L21/60
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