| 摘要 |
A trace structure of fine-pitch pattern includes a connection portion, a first conductive wire portion and a second conductive wire portion, the first conductive wire portion comprises a first section and a second section connected to the first section, the first section connects to the connection portion, the second conductive wire portion comprises a third section and a fourth section connected to the third section, the third section connects to the connection portion, wherein an etching space closed on three sides is formed by the connection portion, the third section and the first section, a first spacing is defined between the third section and the first section, a second spacing is defined between the fourth section and the second section, wherein the first spacing is larger than the second spacing so as to make an metal layer within the etching space completely removed to avoid metal layer residues. |
