| 摘要 |
A gas inlet part made of an elastic material is prevented from getting scratched by contact with a nozzle, and adhesion between the gas inlet part and the nozzle is prevented. A container is positioned, and a purge gas is introduced let from the nozzle into a gas inlet hole in the center of a circular bottom surface of the gas inlet part provided on the bottom of the container. The nozzle has a planar top end surface having a size equal to or greater than that of the bottom surface of the gas inlet part, and a nozzle hole in the center of the top end surface, and has a size equal to or smaller than that of the gas inlet hole. The top end surface is roughened or made of a lubricative material so that the top end surface and the gas inlet part are mutually slidable. |
