发明名称 MEASURING DEVICE AND MEASURING METHOD
摘要 PROBLEM TO BE SOLVED: To adjust relative positions of a light collection position of a terahertz wave and a sample in a depth direction, and reduce the influence of a difference in terahertz wave state.SOLUTION: A measuring device 100 measuring a time waveform of a terahertz wave from a measuring target object 180, comprises: an irradiation unit 101 shaping the terahertz wave and irradiating a first surface and a second surface of the measuring target object 180 with the shaped terahertz wave; a positional information acquisition unit 105 acquiring positional information on a measuring region of the terahertz wave shaped by the irradiation unit 101; and a position adjustment unit 104 adjusting relative positions, in a depth direction of the measurement target object 180, of a light collection position of the terahertz wave shaped by the irradiation unit 101 and the measuring target object 180 on the basis of the positional information on the measuring region acquired by the positional information acquisition unit 105, the positional information acquisition unit 105 acquiring the positional information on the measuring region using relational information representing a relation between positions of the first surface and the second surface in the depth direction adjusted by the position adjustment unit 104, and intensities of the terahertz wave or beam propagation shapes reflected by the first surface and the second surface, respectively.SELECTED DRAWING: Figure 1
申请公布号 JP2016028230(A) 申请公布日期 2016.02.25
申请号 JP20150106773 申请日期 2015.05.26
申请人 CANON INC 发明人 ITSUJI TAKEAKI
分类号 G01N21/3586;G01N21/01 主分类号 G01N21/3586
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