| 摘要 |
PURPOSE:To obtain a antireflection coating having adhesion, heat resistance and moisture resistance by laminating cerium oxide having a refractive index higher than that of a base plate and Siox having a refractive index lower than that of the base successively on the base. CONSTITUTION:Cerium oxide with 1/4lambda0 is formed on the base plate. Thin film accumulation technique such as vacuum deposition, ion plating and sputtering is used as the forming method. Then, an 1/4lambda0 film consisting of Siox (provided that 0<x<2) is formed on the cerium oxide. In this case, Sio is used as a vapor-deposition source, the Siox film is formed by leading the small quantity of oxigen gas into a vacuum chamber and vapor depositing in a low vacuum and bd=1.40-1.90 refractive index is shown in accordance with the value of (x). Consequently, the inexpensive and thin antireflection coating excellent in adhesion, heat resistance and moisture resistance can be obtained. |
