INSTANT RESPONSE PRESSURE SENSOR

摘要

An instant response pressure sensor is disclosed. An embodiment shows no continuous gap is configured between a piezoresistor and neighboring element(s) in thickness direction. The instant response pressure sensor is able to respond immediately to an extremely small pressure applied thereupon in the early stage with an extremely small distance movement because the instant response pressure sensor without having an extra press journey to move before trigging.

主权项

1. An instant response pressure sensor, comprising:
a top electrode; a top piezoresistor, configured on a bottom side of the top electrode; a bottom piezoresistor, configured under the top piezoresistor; wherein the bottom piezoresistor contacts the top piezoresistor with an infinite resistance between the top piezoresistor and the bottom piezoresistor before a pressure applied against the pressure sensor; and a bottom electrode, configured on a bottom side of the bottom piezoresistor.