OPTICAL SCANNER HAVING A VARIABLE FOCUS MIRROR

摘要

An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed.

主权项

1. An optical scanner comprising:
a substrate having a rigid body and a beam; and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam, wherein the layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body on the rigid body and on the beam and (ii) having an actuator part that is formed as an outward protrusion part of the layered body protruding from the rigid body, and the vari-focal mirror made as a part of the layered body on a rest part of the beam other than the resonance scanner portion and an outward protrusion part of the layered body protruding from the beam, the layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire that applies a mirror drive voltage to the vari-focal mirror, the mirror driving wire providing an electric current path extending from the vari-focal mirror and passing through the resonance scanner portion to an outside of the resonance scanner portion, the interlayer insulation film of the resonance scanner portion is made from a piezoelectric film, and the interlayer insulation film of the mirror driving wire is made from a non-piezoelectric insulation film.