发明名称 COHESIVE LAYER COMPOSITION, FILM MANUFACTURING METHOD BY NANOIMPRINT, MANUFACTURING METHOD OF OPTICAL PART, MANUFACTURING METHOD OF CIRCUIT BOARD, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide: a cohesive layer composition which enables the achievement of sufficient adhesion between a photocurable composition and a base material, and enables the suppression of occurrence of a defect of pattern delamination.SOLUTION: A cohesive layer composition for forming a cohesive layer between a substrate and a photocurable composition comprises at least a compound (A) having two or more binding functional groups, and a solvent (B). The functional group of the compound (A) binding to the substrate is at least one selected from a hydroxyl group, a carboxyl group, a thiol group, an amino group, an epoxy group and a (block)isocyanate group; the functional group binding to the photocurable composition is a hydrogen-donative functional group. The functional group binding to the substrate, and the functional group binding to the photocurable composition directly couple with carbon hydride or aromatic carbon hydride independently of each other.SELECTED DRAWING: Figure 1
申请公布号 JP2016028419(A) 申请公布日期 2016.02.25
申请号 JP20150135558 申请日期 2015.07.06
申请人 CANON INC 发明人 HONMA TAKESHI;ITO TOSHIKI;OTANI TOMONORI;SAKAMOTO KAZUMI
分类号 H01L21/027;B29C59/02;B32B27/00;B32B27/30;C09D5/00;C09D7/12;C09D201/02 主分类号 H01L21/027
代理机构 代理人
主权项
地址