| 发明名称 |
REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM |
| 摘要 |
Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner. |
| 申请公布号 |
US2016056061(A1) |
申请公布日期 |
2016.02.25 |
| 申请号 |
US201514933832 |
申请日期 |
2015.11.05 |
| 申请人 |
QUANTUM GLOBAL TECHNOLOGIES LLC |
发明人 |
Wang Jiansheng;Stanczyk Barbara;Boyd, JR. Wendell;Papke Kevin A.;Sommers Joseph F.;Do David |
| 分类号 |
H01L21/67;B08B3/14;B08B3/10;H01L21/677 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A system for cleaning parts disposed in a liner with a cleaning fluid, comprising:
a portable cart; a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the liner; and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner. |
| 地址 |
DUBLIN PA US |
