PLASMA UNIFORMITY CONTROL BY ARRAYS OF UNIT CELL PLASMAS

摘要

The present invention provides an apparatus having a plasma profile control plate disposed in a plasma processing chamber so as to locally alter plasma density to provide uniform plasma distribution across a substrate surface during processing. In one embodiment, a process kit includes a plate configured to be disposed in a plasma processing chamber, a plurality of apertures formed therethrough, the apertures configured to permit processing gases to flow through the plate, and an array of unit cells including at least one aperture formed in the plate, wherein each unit cell has an electrode assembly individually controllable relative to electrode assemblies disposed in at least two other unit cells.

主权项

1. A process kit, comprising:
a plate configured to be disposed in a plasma processing chamber; a plurality of apertures formed therethrough, the apertures configured to permit processing gases to flow through the plate; and an array of unit cells including at least one aperture formed in the plate, wherein each unit cell has an electrode assembly individually controllable relative to electrode assemblies disposed in at least two other unit cells.