ARC VAPORIZATION OF METALLIC, INTERMETALLIC, AND CERAMIC TARGET MATERIALS IN ORDER TO PRODUCE Al-Cr-N COATINGS

摘要

Arc vaporization of targets produced by means of powder metallurgy in Which the components are in the form of intermetallic compounds. The target is produced using a powder that contains a first and second intermetaallic compound and/or a first and second ceramic compound.

主权项

1. A method for coating a substrate using cathodic arc vaporization, comprising:
using a target produced by powder metallurgy as a material source for the arc vaporization, wherein a powder used for producing the target contains a first intermetallic compound and a second intermetallic compound.