发明名称 TRANSPORT DEVICE AND TRANSPORT METHOD
摘要 [Problem] To provide a transport device in which the presence of the lid of a container can be easily and reliably determined. [Solution] A transport device (1) transports a container (3) having a lid (2) on a side face (3b) thereof and is provided with a lid detection unit (6) for detecting whether or not the lid (2) of the container (3) is present.
申请公布号 WO2016027558(A1) 申请公布日期 2016.02.25
申请号 WO2015JP67166 申请日期 2015.06.15
申请人 MURATA MACHINERY, LTD. 发明人 KOBAYASHI, MAKOTO
分类号 H01L21/677 主分类号 H01L21/677
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