发明名称 POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD
摘要 PROBLEM TO BE SOLVED: To reduce flexibility and resulting internal deformations by increasing stiffness and/or damping of a body of an object.SOLUTION: A positioning system to position a movable object having a body includes an object position measurement system, an object actuator, and an object controller. The positioning system further includes a stiffener to increase the stiffness and/or to damp relative movements within the body of the object. The stiffener includes; one or more sensors each arranged to determine a measurement signal representative of an internal strain or relative displacement in the body; one or more actuators each arranged to exert actuation force on a part of the body; and at least one controller configured to provide, on the basis of the measurement signal of at least one of the sensors, an actuation signal to at least one of the actuators to increase the stiffness and/or to damp movements within the body.SELECTED DRAWING: Figure 3
申请公布号 JP2016028306(A) 申请公布日期 2016.02.25
申请号 JP20150222182 申请日期 2015.11.12
申请人 ASML NETHERLANDS BV 发明人 VAN EIJK JAN;VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS;JOHANNES PETRUS MARTINUS BERNARDUS
分类号 G03F7/20;G01B11/00;H01L21/68 主分类号 G03F7/20
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