发明名称 SHAPE MEASUREMENT DEVICE, STRUCTURE PRODUCTION SYSTEM, SHAPE MEASUREMENT METHOD, STRUCTURE PRODUCTION METHOD, AND SHAPE MEASUREMENT PROGRAM
摘要 The time and labor required to set an extraction region of point cloud data is decreased. A shape measuring apparatus includes a projecting unit that projects a measurement beam onto a measurement region of a measurement target, an imaging unit that captures an image of the measurement target onto which the measurement beam is projected, a movement mechanism that relatively moves the projecting unit or the imaging unit with respect to the measurement target so that a position of the measurement region of the measurement target changes, and an extraction region setting unit that sets an extraction region for image information used for calculating a position of the measurement target from capture images captured by the imaging unit, on the basis of positions of images of the measurement beam captured by the imaging unit when the measurement beam is projected onto different measurement regions.
申请公布号 US2016054119(A1) 申请公布日期 2016.02.25
申请号 US201414779865 申请日期 2014.03.14
申请人 NIKON CORPORATION 发明人 KANTO Kenta
分类号 G01B11/25;G01B11/24 主分类号 G01B11/25
代理机构 代理人
主权项 1. A shape measuring apparatus comprising: a projecting unit that projects a measurement beam onto a measurement region of a measurement target; an imaging unit that is arranged at a position different from the projection unit, and that captures an image of the measurement region onto which the measurement beam is projected; a movement mechanism that is configured to support the projection unit and the imaging unit, and that relatively moves one of the projecting unit and the imaging unit with respect to the measurement target so that a position of the measurement region of the measurement target changes; and an extraction region setting unit that is connected to the imaging unit communicatably, and that sets an extraction region for image information from capture images captured by the imaging unit, on the basis of positions of images of the measurement beam captured by the imaging unit when the measurement beam is projected onto different measurement regions, the image information being used for calculating a position of the measurement target.
地址 Tokyo JP