System and Method for Apodization in a Semiconductor Device Inspection System

摘要

An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or more apodization elements operatively coupled to one or more actuation stages. The one or more actuation stages are configured to selectably actuate the one or more apodization elements along one or more directions. The inspection system includes a control system communicatively coupled to the one or more actuation stages. The control system is configured to selectably control an actuation state of at the one or more apodization elements so as to apply a selected apodization profile formed with the one or more apodization elements.

主权项

1. An inspection system with selectable apodization, comprising:
an illumination source configured to illuminate a surface of a sample disposed on a sample stage; a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system including an illumination arm and a collection arm; and a selectably configurable apodization device disposed along the optical pathway of the optical system, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages, the one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions in order to apply a selected apodization profile.