OPTICAL IMAGE MEASURING APPARATUS

摘要

A clear image of a measurement target in optical coherence tomography (OCT) is obtained while suppressing influence of reflected light from a specific portion. Included are a laser beam source, a beam splitter that splits a laser beam into a signal beam and reference beam; an objective lens that focuses the signal beam onto a measurement target in a container, a unit that moves the signal beam focus position, an objective lens that focuses the reference beam, a reflecting mirror, a flat plate arranged between the objective lens and reflecting mirror, and interference optics that combine the signal beam reflected by the measurement target with the reference beam reflected by the reflecting mirror and having passed through the objective lens. Three or more interference beams with different phases, and photodetectors that detect the interference beams are generated, and two of the objective lenses are the same lenses.

主权项

1. An optical image measuring apparatus comprising:
a light source configured to emit a laser beam; a beam splitter configured to split the laser beam emitted from the light source into a signal beam and a reference beam; a first objective lens configured to focus the signal beam onto a measurement target in a container to irradiate the measurement target with the signal beam; a focus position moving unit configured to move a focus position of the signal beam; a second objective lens configured to focus the reference beam; a reflecting mirror configured to reflect the reference beam that has passed through the second objective lens and return the reference beam to the second objective lens; a flat plate arranged between the second objective lens and the reflecting mirror; interference optics configured to combine the signal beam reflected or scattered by the measurement target with the reference beam that has been reflected by the reflecting mirror and has passed through the second objective lens, thereby generating three or more interference beams with different phases; and a photodetector configured to detect the interference beams, wherein the second objective lens is the same objective lens as the first objective lens, and the flat plate has the same material and the same thickness as a portion, which transmits the signal beam, of the container.