发明名称 WORD LINE CONNECTION FOR MEMORY DEVICE AND METHOD OF MAKING THEREOF
摘要 A three-dimensional monolithic memory device includes at least one device region and a plurality of contact regions each including a stack of an alternating plurality of conductive word line contact layers and insulating layers located over a substrate, where the stacks in the plurality of contact regions are separated from one another by an insulating material, and a bridge connector including a conductive material extending between a first conductive word line contact layer of a first stack in a first contact region and a second conductive word line contact layer of a second stack in a second contact region, where the first word line contact layer extends in a first contact level substantially parallel to a major surface of the substrate and the second word line contact layer extends in a second contact level substantially parallel to the major surface of the substrate that is different than the first level.
申请公布号 WO2016028484(A1) 申请公布日期 2016.02.25
申请号 WO2015US43544 申请日期 2015.08.04
申请人 SANDISK 3D LLC 发明人 TAKAKI, SEJE
分类号 H01L27/02;H01L27/06;H01L27/115 主分类号 H01L27/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利