| 摘要 |
A dual Z-axis magnetoresistive angle sensor, comprising a circular permanent magnet encoding disc (3), two Z-axis magnetoresistive sensor chips (1, 2) and a PCB (5), two Z-axis magnetoresistive sensors (9) being located on the PCB (5), the magnetic field sensitive directions of the Z-axis magnetoresistive sensors (9) being orthogonal. The Z-axis magnetoresistive sensor chips (1, 2) each comprise a substrate (8) and at least one magnetoresistive sensor (9) located on the substrate (8), the magnetic field sensitive direction of the magnetoresistive sensor (9) being perpendicular to the substrate (8), the magnetoresistive sensor (9) comprising a flux concentrator (6) and magnetoresistive sensing units (7), the magnetoresistive sensing units (7) being electrically connected into a push-pull structure, a push arm and a pull arm of the push-pull structure being respectively located at two side positions equidistant from a Y-axis central line and above or below the flux concentrator (6). The circular permanent magnet encoding disc (3) is provided with a magnetisation direction parallel to the diameter direction, and when the permanent magnet encoding disc (3) rotates, a magnetic field measurement angle is calculated via orthogonal magnetic fields measured by the two Z-axis magnetoresistive sensor chips (1, 2), and may be used for representing a rotation angle of the circular permanent magnet encoding disc (3). The present invention has a simple structure, high sensitivity and high spatial flexibility. |
