Micromechanical Sensor Device and Corresponding Production Method

摘要

A micromechanical sensor device and a corresponding production method include a substrate that has a front and a rear and a plurality of pillars that are formed on the front of the substrate. On each pillar, a respective sensor element is formed, which has a greater lateral extent than the associated pillar. A cavity is provided laterally to the pillars beneath the sensor elements. The sensor elements are laterally spaced apart from each other by respective separating troughs and make electrical contact with a respective associated rear contact via the respective associated pillar.

主权项

1. A micromechanical sensor device, comprising:
a substrate having a front side and a rear side; a plurality of columns formed on the front side of the substrate; a respective sensor element formed on each column, said sensor element having a larger lateral extent than the associated column; and a cavity defined laterally with respect to the columns below the sensor elements, wherein the sensor elements are laterally spaced apart from one another by respective isolating trenches and are electrically contacted via the respective associated column at a respective associated rear-side contact.