发明名称 SEMICONDUCTOR LIGHT EMITTING ELEMENT AND METHOD FOR MANUFACTURING THE SAME
摘要 According to one embodiment, a semiconductor light emitting element includes a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type separated from the first semiconductor layer in a first direction, a light emitting layer provided between the first and second semiconductor layers, and a first intermediate unit provided between the first semiconductor layer and the light emitting layer. The light emitting layer includes a well layer including a nitride semiconductor including In. The first intermediate unit includes stacked bodies. The stacked bodies are arranged in the first direction. Each of the stacked bodies includes a first layer of Inx1Ga1-x1N, a second layer of Aly1Ga1-y1N provided between the first layer and the light emitting layer to contact the first layer, and a third layer of Aly2Ga1-y2N provided between the second layer and the light emitting layer to contact the second layer.
申请公布号 US2016056329(A1) 申请公布日期 2016.02.25
申请号 US201514714500 申请日期 2015.05.18
申请人 Kabushiki Kaisha Toshiba 发明人 YOSHIDA Hisashi;Hikosaka Toshiki;Kimura Shigeya;Nago Hajime;Nunoue Shinya
分类号 H01L33/06;H01L33/32;H01L33/24;H01L33/00 主分类号 H01L33/06
代理机构 代理人
主权项 1. A semiconductor light emitting element, comprising: a first semiconductor layer of a first conductivity type; a second semiconductor layer of a second conductivity type separated from the first semiconductor layer in a first direction; a light emitting layer provided between the first semiconductor layer and the second semiconductor layer, the light emitting layer including a well layer including a nitride semiconductor including In; and a first intermediate unit provided between the first semiconductor layer and the light emitting layer, the first intermediate unit including a plurality of stacked bodies, the stacked bodies being arranged in the first direction, each of the stacked bodies including: a first layer of Inx1Ga1-x1N (0<x1<1);a second layer of Aly1Ga1-y1N (0<y1<1) provided between the first layer and the light emitting layer, to contact the first layer; anda third layer of Aly2Ga1-y2N (0≦y2<y1) provided between the second layer and the light emitting layer, to contact the second layer, a screw dislocation density of the first semiconductor layer being 1×108/cm2 or more.
地址 Minato-ku JP