CONTROL-ELECTRODE SHIELDING FOR IMPROVED LINEARITY OF A MEMS DVC DEVICE

摘要

The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in essence, block or shield the RF electrode from the one or more electrodes that cause the plate to move. By shielding the RF electrode, coupling of the RF electrode to the one or more electrodes that cause the plate to move is reduced and capacitance modulation is reduced or even eliminated.

主权项

1. A MEMS DVC, comprising:
a first dielectric layer having a first electrode, an RF electrode, and a shielding electrode disposed therein wherein the shielding electrode is dispose adjacent the RF electrode and the first electrode and wherein the shielding electrode is grounded; a second dielectric layer disposed over the first electrode, the RF electrode and the shielding electrode; a second electrode disposed opposite the first electrode and having a third dielectric layer thereover; and a movable electrode movable from a position in contact with the second dielectric layer and a position in contact with the third dielectric layer.