SCANNER FOR TWO-DIMENSIONAL OPTICAL SCANNING, MANUFACTURING METHOD THEREOF, AND MEDICAL IMAGING APPARATUS USING THE SAME

摘要

Provided are a scanner for two-dimensional optical scanning capable of implementing two-dimensional driving by one input signal without an additional structure for modulating a resonance frequency using modulation of the resonance frequency through asymmetry of the scanner itself, and a manufacturing method thereof. In addition, there is provided a manufacturing method of a scanner for two-dimensional optical scanning capable of implementing compact packaging through a micro electro mechanical systems (MEMS) process to miniaturize the scanner, such that it may be used in a micro-miniature system such as an endoscope and capable of increasing precision of the scanner and manufacturing the scanner in various shapes and at a low cost. Further, there is provided a medical imaging apparatus using a scanner for two-dimensional optical scanning capable of providing a medical image having improved quality without crosstalk between axes through separation of resonance frequencies.

主权项

1. A scanner for two-dimensional optical scanning, comprising:
a first fixing part; a second fixing part disposed so as to be spaced apart from the first fixing part; two or more driving arms having both ends connected and fixed to the first and second fixing parts, formed as one set and formed so that end portions thereof fixed to the second fixing part are electrically connected to each other, and formed so that a resonance frequency in an X axis direction and a resonance frequency in a Y axis direction are different from each other; and an optical fiber having one side fixed to the first fixing part and the other side fixed to the second fixing part, disposed so as to be spaced apart from one side of the driving arms in a width direction, and disposed at a height different from that of the driving arms in a height direction.