发明名称 ELECTRONIC COMPONENT AND METHOD FOR PRODUCING SAME
摘要 Provided is an electronic component that includes a thin-film resistive element having a desired resistance value. Since the concentration of Ni on a connection interface of a resistive thin-film 10 with connection electrodes 11 and 12 is higher than that on the opposite side, the work function on the connection interface of the resistive thin-film 10 with the connection electrodes 11 and 12 and the work function of the connection electrodes 11 and 12 can be made closer to each other. It is therefore possible to prevent an increase in contact resistance that occurs on the connection interface between the resistive thin-film 10 and the connection electrodes 11 and 12 due to a difference between the work functions. It is therefore possible to provide an electronic component 100 that includes a thin-film resistive element R1 having a desired resistance value in the design of the resistive thin-film 10.
申请公布号 WO2016027692(A1) 申请公布日期 2016.02.25
申请号 WO2015JP72448 申请日期 2015.08.07
申请人 MURATA MANUFACTURING CO., LTD. 发明人 ASHIMINE, TOMOYUKI
分类号 H01C7/00;C23C14/20;H01G7/06;H01L21/768;H01L21/822;H01L23/522;H01L27/04 主分类号 H01C7/00
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