发明名称 STRIPPING COMPOSITION FOR REMOVING PHOTORESIST AND A METHOD, FOR PEELING PHOTORESIST, USING SAME
摘要 The present invention relates to a stripping composition for removing a photoresist and a method, for peeling a photoresist, using same, the stripping composition comprising: one or more amine compounds; an amide-based compound having substituted 1 to 2 of straight or branched alkyl groups, having from 1 to 5 carbon atoms, for nitrogen; a polar organic solvent; a particular triazole-based compound; and a benzimidazole-based compound.
申请公布号 WO2016027985(A1) 申请公布日期 2016.02.25
申请号 WO2015KR07198 申请日期 2015.07.10
申请人 LG CHEM, LTD. 发明人 PARK, TAE MOON;JUNG, DAE CHUL;LEE, DONG HOON;LEE, WOO RAM;LEE, HYUN JUN;KIM, JU YOUNG
分类号 G03F7/42 主分类号 G03F7/42
代理机构 代理人
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