发明名称 |
STRIPPING COMPOSITION FOR REMOVING PHOTORESIST AND A METHOD, FOR PEELING PHOTORESIST, USING SAME |
摘要 |
The present invention relates to a stripping composition for removing a photoresist and a method, for peeling a photoresist, using same, the stripping composition comprising: one or more amine compounds; an amide-based compound having substituted 1 to 2 of straight or branched alkyl groups, having from 1 to 5 carbon atoms, for nitrogen; a polar organic solvent; a particular triazole-based compound; and a benzimidazole-based compound. |
申请公布号 |
WO2016027985(A1) |
申请公布日期 |
2016.02.25 |
申请号 |
WO2015KR07198 |
申请日期 |
2015.07.10 |
申请人 |
LG CHEM, LTD. |
发明人 |
PARK, TAE MOON;JUNG, DAE CHUL;LEE, DONG HOON;LEE, WOO RAM;LEE, HYUN JUN;KIM, JU YOUNG |
分类号 |
G03F7/42 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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