| 摘要 |
Provided is a semiconductor transport member that includes a semiconductor carrying member having a strong gripping force and less susceptible to contaminants adhering to and remaining on the semiconductor side thereof. Further provided is a semiconductor carrying member having a strong gripping force and less susceptible to contaminants adhering to and remaining on the semiconductor side thereof. This semiconductor transport member includes a transport substrate and a semiconductor carrying member, wherein the semiconductor carrying member has a fibrous columnar structure, the fibrous columnar structure is provided with a plurality of fibrous columns, the fibrous columns are oriented substantially perpendicular to the transport substrate, and the surface of the fibrous columnar structure on the side opposite from the transport substrate side thereof has a static friction coefficient of at least 2.0 with respect to a glass surface. |
