发明名称 IMPRINTING MATERIAL
摘要 [Problem] To provide a novel imprinting material and a film manufactured from said material and having a pattern transferred thereon. [Solution] An imprinting material containing components (A), (B), (C), and (D) below. Component A is a compound represented by formula (1), (2), or (3) (wherein X is a 1-5 carbon atom straight-chain alkylene group, R1 is a hydrogen atom or methyl group, R2, R3, and R4 are each independently a hydrogen atom, methyl group, or ethyl group, and the sum of the number of carbon atoms in R2, R3, and R4 is 0-2.) Component B is a silsesquioxane compound having a repeating unit represented by formula (4) and having two or more polymerizable groups represented by Y in the formula. Component C is a silicone compound having a repeating unit represented by formula (5) and having two polymerizable groups at the terminal end thereof (wherein R6 and R7 are each independently a 1-3 carbon atom alkyl group, R5 is a 1-3 carbon atom alkylene group, and k is an integer of 0 to 3.) Component D is a photopolymerization initiator.
申请公布号 WO2016027619(A1) 申请公布日期 2016.02.25
申请号 WO2015JP71135 申请日期 2015.07.24
申请人 NISSAN CHEMICAL INDUSTRIES, LTD. 发明人 KOBAYASHI, JUNPEI;KATO, TAKU;SHUTO, KEISUKE;SUZUKI, MASAYOSHI
分类号 H01L21/027;B29C59/02;C08F2/44;C08F2/50;C08F290/00 主分类号 H01L21/027
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