| 摘要 |
PROBLEM TO BE SOLVED: To provide a method permitting an observation which can also take into consideration or differentiate effects which are caused by a surface topography.SOLUTION: Provided is a multiple-stage method of determining surface properties, with the steps of: determining at least one topographical property of at least one region of a surface to be investigated 10; determining an optical property of at least this region of the surface to be investigated 10; and emitting at least one value which is characteristic of this optical property. When the value which is characteristic of this optical property is determined, the topographical property of the region is taken into consideration.SELECTED DRAWING: Figure 2 |
