发明名称 UNDERFILL DISPENSING WITH CONTROLLED FILLET PROFILE
摘要 A method includes placing an underfill-shaping cover on a package component of a package, with a device die of the package extending into an opening of the underfill-shaping cover. An underfill is dispensed into the opening of the underfill-shaping cover. The underfill fills a gap between the device die and the package component through capillary. The method further includes, with the underfill-shaping cover on the package component, curing the underfill. After the curing the underfill, the underfill-shaping cover is removed from the package.
申请公布号 US2016056063(A1) 申请公布日期 2016.02.25
申请号 US201514930032 申请日期 2015.11.02
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Chuang Chun-Chih;Cheng Jung Wei;Lin Chun-Hung;Wang Tsung-Ding
分类号 H01L21/67 主分类号 H01L21/67
代理机构 代理人
主权项 1. An underfill-dispensing tool set for dispensing an underfill, the underfill-dispensing tool set comprising: an underfill-dispensing boat; an underfill-shaping cover comprising: a first through-opening; anda non-sticking material on a sidewall of the first through-opening, wherein the non-sticking material is not sticky to the underfill; a plurality of guide pins attached to a first one of the underfill-dispensing boat and the underfill-shaping cover; and a plurality of openings in a second one of the underfill-dispensing boat and the underfill-shaping cover, wherein the plurality of guide pins is configured to be inserted into the plurality of openings.
地址 Hsin-Chu TW