发明名称 |
UNDERFILL DISPENSING WITH CONTROLLED FILLET PROFILE |
摘要 |
A method includes placing an underfill-shaping cover on a package component of a package, with a device die of the package extending into an opening of the underfill-shaping cover. An underfill is dispensed into the opening of the underfill-shaping cover. The underfill fills a gap between the device die and the package component through capillary. The method further includes, with the underfill-shaping cover on the package component, curing the underfill. After the curing the underfill, the underfill-shaping cover is removed from the package. |
申请公布号 |
US2016056063(A1) |
申请公布日期 |
2016.02.25 |
申请号 |
US201514930032 |
申请日期 |
2015.11.02 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Chuang Chun-Chih;Cheng Jung Wei;Lin Chun-Hung;Wang Tsung-Ding |
分类号 |
H01L21/67 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
|
主权项 |
1. An underfill-dispensing tool set for dispensing an underfill, the underfill-dispensing tool set comprising:
an underfill-dispensing boat; an underfill-shaping cover comprising:
a first through-opening; anda non-sticking material on a sidewall of the first through-opening, wherein the non-sticking material is not sticky to the underfill; a plurality of guide pins attached to a first one of the underfill-dispensing boat and the underfill-shaping cover; and a plurality of openings in a second one of the underfill-dispensing boat and the underfill-shaping cover, wherein the plurality of guide pins is configured to be inserted into the plurality of openings. |
地址 |
Hsin-Chu TW |