发明名称 CIRCUIT BOARD FORMATION USING ORGANIC SUBSTRATES
摘要 A method of forming a circuit board includes forming a conductive pattern on a substrate; forming a first negative resist on the substrate after formation of the conductive pattern; partially exposing the first negative resist on the surface of the conductive pattern to form a first via exposure portion; forming a second negative resist on the substrate after formation of the first via exposure portion; partially exposing the second negative resist on the first via exposure portion to form a second via exposure portion larger than the first via exposure portion; developing the first negative resist and the second negative resist after formation of the second via exposure portion to form a via opening reaching the conductive pattern; and filling the via opening with a conductive material.
申请公布号 US2016057857(A1) 申请公布日期 2016.02.25
申请号 US201514817378 申请日期 2015.08.04
申请人 International Business Machines Corporation 发明人 Mori Hiroyuki;Noma Hirokazu;Okamoto Keishi
分类号 H05K1/03;H05K1/11;G03F7/32;G03F7/40;G03F7/16;G03F7/20 主分类号 H05K1/03
代理机构 代理人
主权项
地址 Armonk NY US