| 摘要 |
The present invention provides a holder for a polishing device which prevents a polishing pad from being damaged while also suppressing sagging of an edge of an object to be polished and detachment thereof, and which also prevents a frame member from being peeled off. <b/>A holder (13) includes a holder pad (15) formed of a foamed polyurethane containing a large number of pores (19) thereinside, and an annular frame member (17) that encircles a holding surface of the holder pad (15) along the perimeter of the holding surface. <b/>The holder pad (15) includes a step (21) formed by cutting the perimeter of the holding surface by a predetermined depth.<b/>The frame member (17) is bonded to the holder pad (15) on the horizontal plane of the step (21), and is fastened to the holder pad (15) in such a way that the inner perimeter surface faces a vertical face of the step (21). |
