| 摘要 |
According to one embodiment, there is provided an anomaly detection system for a second unit incidental to a first unit that processes a substrate. The anomaly detection system includes a collecting unit, a first calculating unit, a second calculating unit, and a determining unit. The collecting unit is configured to collect a plurality of types of parameters related to a state of the second unit. The first calculating unit is configured to calculate a divergence of a coordinate point from a reference space in a virtual coordinate space of a plurality of types of parameters, the coordinate point being indicated by the plurality of types of collected parameters. The second calculating unit is configured to accumulate the calculated divergence and calculate a cumulative divergence. The determining unit is configured to compare the calculated cumulative divergence with a threshold value and determine an anomaly in the second unit. |
