EXHAUST UNIT, APPARATUS AND METHOD FOR TREATING SUBSTRATE WITH THE UNIT

摘要

The present invention relates to an apparatus and a method for treating a substrate. The apparatus includes a process chamber which provides a process space for treating a substrate therein, and an exhaust unit which exhausts fume generated in the process space. The exhaust unit includes an integration pipe which is combined with the process chamber and has an integration flow path, a plurality of branch pipes which have branch flow paths, and a valve assembly which connects the integration flow path and the selected branch flow path. The valve assembly includes an inner body which has a buffer space therein, and a driving member which rotates the inner body to connect one part of the branch flow path to the integration flow path and to block the other part of the branch flow path. Therefore, the apparatus can simplify the configuration of the exhaust unit which selectively opens the branch pipes.