| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an eddy current detection method and an eddy current detection apparatus capable of accurately detecting an eddy current even when temperature of an excitation/detection coil is changed. <P>SOLUTION: When a virtual object W corresponding to a measurement object is used as an object and temperature of an excitation/detection coil 16 is changed, an approximate straight line A1 expressing behavior of an inter-middle point potential difference V of an inductance bridge circuit on a complex plane is calculated. Then, an inclination angle θa of the approximate straight line A1 from a real number axis or an imaginary number axis on the complex plane is calculated. Then, the actual measurement object W is used as an object and the coordinates (Re1, Im1) of the inter-middle point potential difference V on the complex plane are calculated; rotational coordinate conversion for reversely rotating the inclination angle θa to the coordinates (Re1, Im1) is performed; and a real number component Re2 or an imaginary number component Im2 of the converted coordinates is calculated. Then the real number component Re2 or the imaginary number component Im2 is outputted as an eddy current correlation value. <P>COPYRIGHT: (C)2013,JPO&INPIT |
