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发明名称
基板保持装置および基板保持方法
摘要
申请公布号
JP5869943(B2)
申请公布日期
2016.02.24
申请号
JP20120085513
申请日期
2012.04.04
申请人
東京エレクトロン株式会社
发明人
岩下 泰治;平河 修;相馬 康孝;田村 武;福冨 亮
分类号
H01L21/677;B65G49/07
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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