发明名称 インプリント用モールド複合体およびその製造方法
摘要 PROBLEM TO BE SOLVED: To provide a mold composite which allows for peeling with smaller peeling force in the imprint method, while avoiding occurrence of such an inconvenience as a transferred object, i.e., a transferred material, adheres to the mold, and to provide a manufacturing method therefor.SOLUTION: A mold composite for imprint is constituted to include a mold, and more than one kind of different elastic parts attracted or bonded to a region different from the uneven structure region of the mold and integrated therewith, or more than one different rigidity parts attracted or bonded to a region different from the uneven structure region.
申请公布号 JP5867578(B2) 申请公布日期 2016.02.24
申请号 JP20140258866 申请日期 2014.12.22
申请人 大日本印刷株式会社 发明人 有塚 祐樹;中田 尚子
分类号 H01L21/027;B29C33/38;B29C59/02 主分类号 H01L21/027
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