| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable highly accurate refractive index distribution measurement using a two-media method or a two-wavelength method even if pupil size of an illumination optical system is different for each medium or wavelength. <P>SOLUTION: A refractive index distribution measurement method comprises the steps of: acquiring first and second wavefront measurement values which are measured values of wavefronts of light that has passed through a target optical element when the element is placed in a first medium and in a second medium, respectively; computing first and second light beam transmitting regions, which are light transmitting regions of the illuminating optical system corresponding to light transmitting regions of the target optical element when the element is placed in the first medium and in the second medium, respectively; computing first and second wavefront aberrations which are computed aberrations of the illumination optical system corresponding to the first and second light beam transmitting regions, respectively; and making corrections to the first and second wavefront measurement values using the first and second wavefront aberrations to compute a refractive index distribution of the target optical element by using the corrected wavefronts. <P>COPYRIGHT: (C)2013,JPO&INPIT |
