发明名称 |
SEMICONDUCTOR DEVICE TESTING APPARATUS, SEMICONDUCTOR DEVICE TESTING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
摘要 |
A semiconductor device testing apparatus (100) according to an embodiment includes: a first terminal (12) and a second terminal (14) that apply voltage to a semiconductor device; and a light source (16) that irradiates the semiconductor device (18) with ultraviolet light. |
申请公布号 |
EP2988326(A1) |
申请公布日期 |
2016.02.24 |
申请号 |
EP20150172670 |
申请日期 |
2015.06.18 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
OHASHI, TERUYUKI;ILJIMA, RYOSUKE |
分类号 |
H01L21/66;G01R31/26 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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