发明名称 SEMICONDUCTOR DEVICE TESTING APPARATUS, SEMICONDUCTOR DEVICE TESTING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 A semiconductor device testing apparatus (100) according to an embodiment includes: a first terminal (12) and a second terminal (14) that apply voltage to a semiconductor device; and a light source (16) that irradiates the semiconductor device (18) with ultraviolet light.
申请公布号 EP2988326(A1) 申请公布日期 2016.02.24
申请号 EP20150172670 申请日期 2015.06.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 OHASHI, TERUYUKI;ILJIMA, RYOSUKE
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
代理机构 代理人
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