| 摘要 |
Provided is an electrostatic actuator, etc. of simple configuration, said actuator being capable of obtaining a strong pull-away force when a first movable beam is pulled away from a fixed electrode. A static actuator (4) has a fixed driving electrode (21) and a fixed part (22). The fixed driving electrode (21) is provided on a silicon substrate (2). The fixed part (22) has a first movable beam (31) and a second movable beam (32) connected together in a folded-over structure and configured to be expandable in an accordion configuration. An electrostatic force between the first movable beam (31) and the fixed driving electrode (21) causes the movable beams to expand in an accordion configuration so that the first movable beam (31) approaches the fixed driving electrode (21). An electrostatic force between the moveable beams causes the movable beams to contract in an accordion configuration so that the first movable beam (31) moves away from the fixed driving electrode (21). At least one of the movable beams includes an insulator section forming a main body and a conductor layer formed on a surface of the insulator section on a fixed driving electrode (21) side and/or the opposite surface thereto. |
