发明名称 マスクを含む装置およびこれを用いた光照射方法
摘要 Provided are a mask, a method of manufacturing the same, a light irradiation device, a method of radiating light, and a method of manufacturing an orientationally ordered photo-alignment layer. By the mask, collimated light or nearly collimated light may be irradiated with uniform illumination to a surface of an object to be irradiated. Further, by the mask, light may be effectively incident even on the object to be irradiated in the curved shape.
申请公布号 JP5869144(B2) 申请公布日期 2016.02.24
申请号 JP20140544679 申请日期 2012.12.03
申请人 エルジー・ケム・リミテッド 发明人 シン、ブ ゴン
分类号 G03F1/50;G02B5/30;G02F1/1337;G03F7/20;G03F7/24 主分类号 G03F1/50
代理机构 代理人
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