PRODUCTION METHOD FOR C12A7 ELECTRIDE THIN FILM, AND C12A7 ELECTRIDE THIN FILM
摘要
A C12A7 electride thin film fabrication method includes a step of forming an amorphous C12A7 electride thin film on a substrate by vapor deposition under a low-oxygen-partial-pressure atmosphere using a target made of a crystalline C12A7 electride having an electron density within a range of 2.0×10 18 cm -3 to 2.3×10 21 cm -3 .
申请公布号
EP2865782(A4)
申请公布日期
2016.02.24
申请号
EP20130806570
申请日期
2013.06.19
申请人
TOKYO INSTITUTE OF TECHNOLOGY;ASAHI GLASS COMPANY, LIMITED
