发明名称 BONDING METHOD
摘要 The invention relates to a method for bonding a first surface (1a) and a second surface (7a) by means of an interlayer (3), comprising the steps: a) providing a first item (1) which has the first surface (1a), b) providing flowable, solidifiable material for the interlayer (3), c) providing a second item (7) which has the second surface (7a), d) applying the material for the interlayer onto the first surface (1a) so that a bulge (3a) encircling the surface is produced, e) applying a vacuum around the first item (1) and the second item (2), f) bringing the second surface (7a) of the second item (7) into contact with the circumferential bulge so that a sealed-off cavity (5) is produced, g) increasing the ambient pressure so that the cavity (5) is eliminated without resulting in a stream of gas flowing into the cavity and h) increasing the viscosity of the material for the interlayer.
申请公布号 EP2370997(B1) 申请公布日期 2016.02.24
申请号 EP20090760882 申请日期 2009.11.30
申请人 THIN MATERIALS GMBH 发明人 RICHTER, FRANZ
分类号 H01L21/68;B32B37/10;B32B37/12;H01L21/67;H01L21/683 主分类号 H01L21/68
代理机构 代理人
主权项
地址