发明名称 粘着シート及びこれを利用した半導体ウェーハ裏面研削方法
摘要 The present invention relates to a pressure-sensitive adhesive composition including a polymer of a monomer mixture containing isobonyl (meth)acrylate, a pressure-sensitive adhesive sheet, and a semiconductor wafer backgrinding method. In the present invention, by using isobonyl (meth)acrylate which is a hard-type monomer and has a low hydrophilic property, a pressure-sensitive adhesive composition having superior releasing and re-releasing properties and wettability with respect to the wafer, and having an excellent wafer-proofing property; a pressure-sensitive adhesive sheet prepared by using the pressure-sensitive adhesive composition; and a backgrinding method using the pressure-sensitive adhesive sheet can be provided.
申请公布号 JP5867921(B2) 申请公布日期 2016.02.24
申请号 JP20110509414 申请日期 2009.05.14
申请人 エルジー・ケム・リミテッド 发明人 キム、セ ラ;ビーク、ユーン ジェオング;キム、ジャング スーン;リー、ジャエ クワン;パク、ヒュン ウー
分类号 C09J133/14;C09J7/02;C09J11/06;H01L21/304 主分类号 C09J133/14
代理机构 代理人
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